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ThermoElectroMechanical Analysis ModuleTM
Users can perform a wide range of coupled simulations ranging from:
Electrothermal\ Electromechanical\ Thermomechanical \ Magnetomechanical
Thermal-Electrostatic-Mechanical \ Electro-Magneto-Mechanical
Thermal-Electrostatic-Mechanical with contact physics
Thermo-Electrostatic-Mechanical with Rayleigh damping
Thermo-Electro-Mechanical with full Fluid-structure Interaction (Navier-Stokes)
Piezoacoustic\ Piezoresistive-Mechanical\ Piezoresistive-Electrothermal
… and much, much more
Inertial MEMS
Gyroscopes
Accelerometers
RF MEMS
Lowpass filter
Simulation in TEM module
Model in TEM
Set the pressure parameters and run the simulation
Deformed simulation result
Sensors & Actuators
Variable optical attenuator (VOA)
VOA core structure simulation results
Sensors & Actuators
Piezoresistive pressure sensor
Realistic Virtual Prototypes from Physical Process Models
Core part of physical model from process simulation
Meshed FEA physical model
Analysis results
Realistic Virtual Prototypes from Physical Process Models
Micromirror arrays process model
Using IntelliSuite, one can optimize a design without having to go through the costly procedure of prototype development and testing.
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